光刻滤光片ASAHI SPECTRA Photolithography Filters
Optics used for photolithography requires the environmental durability against high temperature and high efficiency in transmission and reflection to contribute a production yield.
Asahi provides bandpass filters for mercury emission lines, longpass filters, or cold mirrors coated by ion assisted deposition (IAD) method. IAD technology assures the durability of interference film against an inhospitable environment in a photolithography apparatus such as stepper. It also achieves the stable spectral performance and high transmission or reflection.
Large format optics is available as well, ∼ 600mm diameter.
光刻滤光片ASAHI SPECTRA i-line Bandpass Filters
High power mercury lamps are often used in for photolithography apparatus such as LSI and LCD steppers as light source, especially i-line (365nm) is the most famous line. The bandpass filters for photolithography are required to transmit the monochromatic mercury line efficiently to achieve optimal resolution for the photomask. Furthermore the reliability for environmental durability cannot be negligible to reduce running cost.
Asahi i-line bandpass filters are produced by ion assisted deposition (IAD) technology with monolithic substrate to assure the durability against high temperature and keep stable spectral performance over time.
▪Long life with stable spectral performance thanks to IAD and monolithic substrate
▪According to the requirements, CWL and FWHM are adjustable
▪Excellent coating uniformity despite of large format filter