产品中心

当前位置:主页 > 产品中心 > 隔振平台系统 > 主动隔振平台 >赛默飞定制版SEM主动隔振系统

赛默飞定制版SEM主动隔振系统

简要描述:赛默飞定制版SEM主动隔振系统
SEM-Base LP is a custom, low profile version of our standard SEM-Base active piezoelectric vibration cancellation platform.

  • 产品型号:SEM Base LP
  • 厂商性质:生产厂家
  • 更新时间:2020-07-11
  • 访  问  量:110
详细介绍

赛默飞定制版SEM主动隔振系统

Overview

SEM-Base LP is a custom, low profile version of our standard SEM-Base active piezoelectric vibration cancellation platform. SEM-Base LP is easier to install, provides outstanding performance, and is ergonomically optimized. The compact design facilitates installation without lifting the Scanning Electron Microscope (SEM) column with anything other than the SEM’s built-in leveling feet. And, once installed, the SEM’s height above the floor does not increase. SEM-Base LP incorporates our unique STACIS piezo technology and has the same vibration cancellation performance as our industry-standard SEM-Base VI. SEM-Base LP includes casters and is designed specifically to integrate with many Thermo Fisher Scientific (formerly FEI) tools.

赛默飞定制版SEM主动隔振系统

Example of how SEM-Base LP integrates with the bottom frame of the tool

 

Compatible Thermo Fisher Tool Models

SEM-Base LP is compatible with many Thermo Fisher Scientific models including:

●Apreo

●Aquilos

●Helios Small DualBeam

●Nova NanoSEM x50

●Quattro S

●Scios

●Teneo

●Verios G4

●Verios 460, 460L

●Versa 3D

 

If your SEM/FIB is not listed, contact TMC to check for compatibility.

 

The SEM-Base Advantage

Hard-Mount Technology – SEM-Base is compatible with internal SEM vibration control systems and aggressively mitigates low frequency floor vibration starting at 0.6 Hz.

Active Inertial Vibration Cancellation – SEM-Base uses high sensitivity, low frequency inertial velocity sensors to achieve high levels of vibration attenuation, even on quiet floors.

Serial Design with Piezoelectric Technology – The unique serial design and proprietary highforce piezoelectric technology results in a wide active bandwidth from 0.6 Hz to 150 Hz and unmatched, inertial active vibration cancellation with 90% reduction starting at 2 Hz.

 

Performance

 

1800 lbs (818 kg) payload tested with simulated vibration at VC-C

(500 μin./s, 12.5 μm/s RMS)

Specifications

Performance Specifications

Active degrees of freedom

6

Active bandwidth

0.6 Hz - 100 Hz

Passive natural frequency

12 Hz nominal

Effective active resonant frequency

0.5 Hz

Isolation at 1 Hz

40% - 70%

Isolation at 2 Hz

90%

Isolation at ≥3 Hz

90-98%

Internal noise

<0.1 nm RMS

Operating load range

900 - 2,500 lbs (408 - 1134 kg)

Magnetic field emitted
at maximum 4 in.(102 mm)
from the platform

<0.02 μG broadband RMS

 

Design, Dimensions, and Environmental and Utility Requirements

Environmental and safety

CE and RoHS compliant

Active isolation elements

High-force piezoelectric actuators that receive signal from a high-voltage amplifier with an output of up to 800 VDC

Passive isolation element

single stiff elastomer (no compressed air supply required)

Vibration sensor elements

Downward facing geophone type inertial sensors
that measure floor vibration below the isolator
and deliver voltage proportional to the velocity of vibration motion

Active feedback control loop

Floor vibration is measured, processed
and attenuated below the spring
supporting the isolated surface

Dimensions (WxD)

33.3 x 34.9 in. | 846 x 887 mm
41 x 34.9 in. | 1041 x 887 mm total with casters

Height

5.26 in. (134 mm) nominal,
doesn't change when SEM-Base is switched off

Operating temperature

50° - 90° F
10° - 32° C

Storage temperature

-40° - 130° F
-40° - 55° C

Humidity

< 80% @ 68° F | 20° C

System power requirements

100, 120, 230, 240 VAC
50/60 Hz AC; <600 W
CE compliant

Floor displacement

<800 μin. (20 μm) below 10 Hz

 

Controller Specifications

Processor

150/75 MHz dual core

Sampling rate

10 kHz

Analog outputs

16 channels

Analog inputs

16 channels

Status light

single LED

Front panel ports

1x serial USB 2.0
1x serial Micro-USB
1x Ethernet RJ-45
2x BNC

User interface

Front panel LCD display
Character menu on HyperTerminal
Extended GUI for Microsoft Windows
Embedded Ethernet GUI

 


产品咨询

留言框

  • 产品:

  • 留言内容:

  • 您的单位:

  • 您的姓名:

  • 联系电话:

  • 常用邮箱:

  • 详细地址:

  • 省份:

  • 验证码:

    请输入计算结果(填写阿拉伯数字),如:三加四=7

服务优势

我们珍惜您每一次在线咨询,用专业的态度为您提供更贴心的服务
在线咨询 联系方式 二维码

服务热线

010-6202 9100

扫一扫,关注我们